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Measure nanometer level transparent film thickness.
Spectroscopic reflectometry film thickness measurement
Spectroscopic reflectometry film thickness measurementFilm thickness is calculated by a curve fitting method using an optical model after the absolute reflectance at six wavelength is measured. Film thicknesses from several nanometers to one micron can be measured. Very small areas, such as sub-micron areas, to whole field of view film thickness distribution can be measured because our method measures film thickness at each detector pixel.
Small area film thickness measurement example
Film thickness distribution measurement example
(Provided by professor Jun Matsui, Matsui laboratory, Yamagata university)
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