Luceo Co., Ltd., a leading manufacturer of optical elements and equipment with over 50 years of experience, has been recognized for its groundbreaking achievement in semiconductor technology. Their newly developed micro-stress inspection machine for semiconductor wafers received the Excellence Award at the Itabashi Product Technology Awards (2023).

LSM-9001NIR Near-IR system to measure strain in semiconductors
LSM-9001NIR Near-IR system to measure strain in semiconductors

Addressing a Critical Need in Wafer Inspection

Traditionally, inspecting residual stress in silicon (Si), silicon carbide (SiC), and gallium nitride (GaN) wafers has been a time-consuming process. Existing solutions from other companies often require single-point measurements, taking anywhere from 10 minutes to several tens of minutes to analyze an entire wafer depending on the chosen measurement pitch.

Luceo’s Revolutionary Approach

Luceo’s innovative machine takes a revolutionary approach to wafer stress inspection. By utilizing a camera, the system can capture measurements across the entire wafer surface simultaneously. This significantly reduces inspection time, bringing it down to a remarkable under 20 seconds.

Cost-Effective and Multifunctional

In addition to its impressive speed advantage, Luceo’s machine boasts a competitive price point, coming in at approximately two-thirds the cost of comparable solutions from competitors. But the benefits don’t stop there. The machine can also be used to:

  • Inspect unevenness during wafer polishing
  • Analyze residual stress around wafer notches

This versatility makes Luceo’s machine a valuable tool for a wide range of players in the semiconductor industry, including:

  • Wafer polishing equipment manufacturers
  • Dicing equipment manufacturers
  • And other companies involved in wafer processing

Looking Ahead

With its speed, affordability, and multifunctionality, Luceo’s micro-stress inspection machine is poised to play a significant role in the semiconductor industry. It offers manufacturers a powerful tool to optimize wafer processing conditions and ensure consistent quality throughout production.

Learn More

Barnett Technical Services is proud to be an authorized distributor of Luceo products. We offer a comprehensive range of Luceo’s high-quality products, ensuring our customers have access to top-notch solutions for their specific needs. Visit https://barnett-technical.com/products-category/luceo/ for more information.