Attolight manufactures the leading cathodoluminescence (CL) microscopes and accessories on the market.  These systems are used for a range of applications, including:

  • Micro-LED characterization
  • Defect Visualization and Counting in Optoelectronic Materials
  • Power Electronics
  • Photovoltaic Materials
  • Defects in Thin Film Battery Materials
  • Semiconducting Diamond

Three types of systems are available:

Allalin – Research-grade SEM-CL Tool

The Allalin is a nanometer resolution spectroscopy instrument, based on quantitative CL that integrates a CL detection tool and a scanning electron microscope (SEM) into one tool.

The Allalin SEM-CL Tool

Some of the benefits of the Allalin include:

Zero alignment needed for CL detection
Large field of view (300 microns) without moving the sample

Simultaneous generation of CL and secondary electron (SE) images

Low-temperature operation to 10K

Upgradable to Chronos time-resolved CL with 10 ps time resolution.

For more details on the Allalin system, please see the Attolight product page:

Quantitative Cathodoluminescence

Attolight has developed the first Quantitative CL system that allows for the comparison of spectra from different regions and samples to representative quantitative differences in your sample.  On Attolight systems, differences of this type are reflective of differences in the material.  Using traditional CL techniques, these differences can often be due to alignment issues related to the parabolic mirror used in these systems.

Secondary electron and CL images of GaN on sapphire. The CL image show threading dislocation defects (TDD) in GaN.

Säntis 300 – Full Wafer CL Measurement Tool

The Säntis 300 CL wafer characterization system.

The Säntis 300 system has been designed for fully automated CL measurements and control of on wafers up to 300mm.  The system is available with a range of options that allow for sample turnaround and process automation

For more details on the Säntis system, please see the Attolight product page:


Chronos – Time-Resolved CL Tool

The Chronos is a time-resolved CL tool that builds on the Allalin quantitative CL system. The system can provide time-resolutions of up to 10 ps with full spectral data reported at each point.

For more details on the Chronos system, please see the Attolight product page:

The Chronos Time-Resolved CL System



Mönch STEM-CL Accessory


The Mönch is a cathodoluminescence detector for STEM that has been designed from the ground up to achieve unprecedented signal-to-noise ratio and spectral resolution.

For more details on the Mönch system, please see the Attolight product page:

The Mönch CL-STEM Accessory

For more information on Attolight, please contact us.  You may also learn more by going to the Attolight web site.