About our Full Wafer Cathodoluminescence-SEM Equipment
The system's quantitative CL technology offers unparalleled speed, accuracy, and repeatability with a large 300 μm field of view. Multiple acquisition modes enable detailed defect analysis, material inhomogeneity mapping, and dynamic process tracking, such as dopant activation or elemental fluctuations.
Small-diameter wafers and miscellaneously-shaped substrates can be manually affixed to larger susceptors for automated handling by the tool, making the Säntis 300 well-suited to failure analysis and research applications where quick turnaround time is important.
About our Full Wafer Cathodoluminescence Microscope
The standard Säntis 300 configuration includes a top-loading loadlock into which wafers are manually placed using a wafer wand. The loadlock facilitates quick loading and unloading operations, increasing throughput compared to our Allalin system. The tool can be upgraded to include support for wafer cassettes (FOUPs) or even a full EFEM with automated wafer handling for integration in fully-automated fabs.- Fully automated quantitativeCL metrology
- Simultaneous SEM imaging & spectra acquisition
- High throughput & automated wafer handling
- Wafer bow mapping & alignment
- Loadlock for fast sample exchange
- Loadlock for rapid sample loading and unloading