Evaluate strain with 2D distribution of low phase difference samples such as semiconductor wafers, colored glass, and colored acrylic resin products. Evaluate up to approx. 50 x 50 mm in 1 minute. Fully automatic measurement reduces work and measurement errors by the measurer. This is capable of performing strain evaluating of semiconductor wafers, colored or transparent products, residual stress, and cracks that are impossible to measure with conventional polariscope.

Inspection MethodNIR Rotating Analyzer Method
Measurement Range (approx.)0~150nm (Retardation)
Measurement area size (approx.)  50×50mm
Measurement object placement space (height)Max 160mm
SizeW300 ☓ D353 ☓ H540 mm
Weight22 kg
OthersLight Source:high-luminanceLED PowerSorce:AC100~240V 50/60Hz DC input 24V 1.6A Component:Mainbody,PC,Cables Accessory:Main body cover OS:Windows10 Pro (64bit)  English