Cathodoluminescence Imaging for Gallium Nitride and MicroLED Characterization

Attolight’s Säntis 300 Full Wafer Characterization Microscope is the fastest and most sensitive method to locate defects in GaN and for microLED systems with sub-pixel resolution. The Säntis employs Attolight’s cathodoluminescence detection methods to provide sub-pixel imaging capabilities and advanced sampling methods to enable the wafer characterization.

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(Under image): The Säntis 300 Wafer Cathodoluminescence Tool

Attolight is presenting their most recent work at Display Week 2021.

Typical microLED CL images may be seen below.

A photo of the Säntis 300 for performing these microLED measurements is shown below.

Attolight’s Säntis 300

Download the Santis Datasheet pdf

BTS Attolight page

Attolight’s Säntis 300 page

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