Attolight’s Säntis 300 Full Wafer Characterization Microscope is the fastest and most sensitive method to locate defects in GaN and for microLED systems with sub-pixel resolution. The Säntis employs Attolight’s cathodoluminescence detection methods to provide sub-pixel imaging capabilities and advanced sampling methods to enable the wafer characterization.
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(Under image): The Säntis 300 Wafer Cathodoluminescence Tool
Attolight is presenting their most recent work at Display Week 2021.
Typical microLED CL images may be seen below.
A photo of the Säntis 300 for performing these microLED measurements is shown below.