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Vertically Scanning White Light Interferometry
Measure nanometer level topography using vertically scanning white light interferometry measurement
Height distribution data is calculated by acquiring z scale values at intensity peak positions of the interference fringes generated by white light and two-beam interference objective lens, even for a wide FOV.
44 nm step height measurement at 1500 μm FOV. Nanometer order step height chromium coated sample:
Dozens to hundreds nanometer cleavage step in micrometer order step measurement example:
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