Reflectometry Film Thickness with Angstrom level height measurement.
Phase Shift Interferometry Measurement
Measure angstrom level topography using phase shift interferometry measurement.
Height distribution data is calculated by phase information analysis of four interference fringe images at different positions on the optical axis. Interference fringes are generated by single wavelength light and two-beam interference objective lens are based on the optical path distribution between the beam splitter and sample surface (height measurement range is within half the source wavelength).
SiC crystal growth.