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Säntis 300 – Full Wafer CL Measurement Tool

The Säntis 300 system has been designed for fully automated CL measurements and control of on wafers up to 300mm.  The system is available with a range of options that allow for sample turnaround and process automation

For more details on the Säntis system, please see the Attolight product page: https://attolight.com/santis/

 

For More information

Please see the Attolight product page: https://attolight.com/chronos/

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